刘

刘永新

主要机构物理学院
关系数0

学术谱系

暂无师承记录。师承数据主要来自 Wikidata 的「博士导师 / 博士生」字段， 我们会持续补充完善。

代表作 6 项

  1. A study on etching properties of quartz and silicon by a dual-frequency (60 MHz/400 kHz) capacitively coupled NF3/Ar/O2 plasma: effect of pressure
    JOURNAL OF PHYSICS D-APPLIED PHYSICS 2025 年
  2. Dynamics of electron power absorption in capacitive radio-frequency CF4 plasmas operating in the striation mode
    PLASMA SOURCES SCIENCE & TECHNOLOGY 2025 年
  3. Discharge similarity in capacitive radio frequency carbon tetrafluoride plasmas
    APPLIED PHYSICS LETTERS 2025 年
  4. Energy efficient F atom generation and control in CF4 capacitively coupled plasmas driven by tailored voltage waveforms
    PLASMA SOURCES SCIENCE & TECHNOLOGY 2024 年
  5. Low-frequency dependence of plasma characteristics in dual-frequency capacitively coupled plasma sources
    APPLIED PHYSICS LETTERS 2024 年
  6. An experimental and computational study on the ignition process of a pulse modulated dual-RF capacitively coupled plasma operated at various low-frequency voltage amplitudes
    PLASMA SOURCES SCIENCE & TECHNOLOGY 2024 年